Epitaxial 3C-SiC nano thin films: A versatile material for MEMS/NEMS applications
Abstract:
Silicon has been the leading semiconductor in Micro Electromechanical Systems (MEMS), where its applications can be found in numerous ubiquitous devices, including smart phone and personal computers. Nevertheless, when it comes to high temperature, high corrosion, and long term stability (e.g. implanted electronics), Si cannot withstand such critical conditions. Owing to its wide energy band gap, excellent optical and mechanical properties, silicon carbide has emerged as a promising alternative of Si for MEMS devices operated in harsh environments. In this talk, I will present our recent studies on the epitaxial growth of high quality single crystal cubic silicon carbide (3C-SiC) on a silicon wafer and its micro/nanomachining technologies at the Queensland Micro & Nanotechnology Centre, Griffith University. The physical properties of the as-deposited films such as piezoresistive effect for strain sensing, thermal resistive effect, and residual stress for sensing applications will also be discussed [1-5]. Finally, I will enclose my talk with a brief overview of SiC micro/nano devices such as strain sensors, temperature sensors, and electrochemical sensors, as well as its potential for the next generation of MEMS devices for harsh environments, energy harvesting and bio applications.
Date and Time
Location
Hosts
Registration
- Start time: 29 Oct 2018 11:00 AM
- End time: 30 Oct 2018 12:00 PM
- All times are (GMT+10:00) Australia/NSW
-
Add Event to Calendar
- Co-sponsored by Mohsen.Asadniya@mq.edu.au
Speakers
Dr. Hoang-Phuong Phan Queensland Micro and Nanotechnology Centre, Griffith University, Qld, Australia
Epitaxial 3C-SiC nano thin films: A versatile material for MEMS/NEMS applications
Silicon has been the leading semiconductor in Micro Electromechanical Systems (MEMS), where its applications can be found in numerous ubiquitous devices, including smart phone and personal computers. Nevertheless, when it comes to high temperature, high corrosion, and long term stability (e.g. implanted electronics), Si cannot withstand such critical conditions. Owing to its wide energy band gap, excellent optical and mechanical properties, silicon carbide has emerged as a promising alternative of Si for MEMS devices operated in harsh environments. In this talk, I will present our recent studies on the epitaxial growth of high quality single crystal cubic silicon carbide (3C-SiC) on a silicon wafer and its micro/nanomachining technologies at the Queensland Micro & Nanotechnology Centre, Griffith University. The physical properties of the as-deposited films such as piezoresistive effect for strain sensing, thermal resistive effect, and residual stress for sensing applications will also be discussed [1-5]. Finally, I will enclose my talk with a brief overview of SiC micro/nano devices such as strain sensors, temperature sensors, and electrochemical sensors, as well as its potential for the next generation of MEMS devices for harsh environments, energy harvesting and bio applications.
Biography:
Dr. Hoang-Phuong Phan (B.E & M.E. The University of Tokyo; Ph.D Griffith University) is a research fellow at the QMNC, Griffith University, where his main interests focus on silicon carbide MEMS/NEMS for applications in harsh environments. He has also been a visiting scholar at the National Institute of Advanced Industrial Science and Technology (AIST), Japan in 2016, and Stanford University, US in 2017. Dr. Phan has published more than 60 peer-reviewed journal articles, two US patents, and two book/book chapter, all in micro and nanotechnologies. He was the recipient of the Japanese Government Scholarships (MEXT) for undergraduate and postgraduate studies (2006-2013), and the GUPRS and GUIPRS scholarships from Griffith University for the doctoral course (2013-2016). Dr. Phan was honoured with the GU publication award, the GU Postdoctoral Fellowship, the Springer outstanding theses award, and the Australian Nanotechnology Network Oversea Fellowship. He was also selected to the Australian delegates in the 23rd World Micromachines Summit in Barcelona, Spain in 2017. Dr. Phan has served as a reviewer for several journals, including JMEMS, Sens. Actuators A, Micromachines, J. Appl. Phys., IEEE Sensors J., Electron Dev. Letts., and Appl. Phys. Lett.