CMOS-MEMS Devices for Communication Systems and Nano Instrumentations


This talk introduces a class of devices and instrumentations that leverage the myriad economic benefits of having integrated systems with both electrical and mechanical functionality on a single-chip. This is enabled by a CMOS post-processing technique developed at the University of Waterloo to create MEMS devices within CMOS chips. We integrate actuation, sensing and control electronics on a single CMOS-chip. This unique chip-scaled technology platform enables the development of highly advanced devices for a wide range of applications including radio frequency (RF) communication systems and nano-instrumentations. The talk will address in particular the use of CMOS-MEMS technology in the realization of instrumentations such an atomic force microscope (AFM) and scanning microwave microscope (SMM) on a single CMOS chip.

  Date and Time




  • Concordia University
  • 1515 St. Catherine W.
  • Montreal, Quebec
  • Canada H3G 2W1
  • Building: EV
  • Room Number: EV011.119
  • Starts 04 November 2019 10:00 AM
  • Ends 11 November 2019 03:00 PM
  • All times are Canada/Eastern
  • No Admission Charge
  • Register


Raafat Mansour


Raafat Mansour is a Professor of Electrical and Computer Engineering at the University of Waterloo and holds Tier 1 - Canada Research Chair (CRC) in Micro-Nano Integrated RF Systems. He held an NSERC Industrial Research Chair (IRC) for two terms (2001-2005) and (2006-2010). Prior to joining the University of Waterloo in January 2000, Dr. Mansour was with COM DEV Cambridge, Ontario, over the period 1986-1999, where he held various technical and management positions in COM DEV$-1òùs Corporate R&D Department. Professor Mansour holds 39 US and Canadian patents and more than 380 refereed publications to his credit. He is a co-author of a 23-chapter Book published by Wiley and has contributed 6 chapters to four other books.

Since joining the University of Waterloo in 2000, Professor Mansour has graduated 37 Ph.D, 33 M.Sc students and trained 15 Postdoctoral Fellows. His students hold key positions in academia and industry, including 5 holding faculty positions. Professor Mansour founded the Centre for Integrated RF Engineering (CIRFE) at the University of Waterloo It houses a clean room and a state-of-the-art RF test and characterization laboratory. Professor Mansour has acted as a catalyst for ideas inspiring the next generation of Waterloo entrepreneurs to bring their work to market. Out of research carried out in his research Lab at the University of Waterloo, Professor Mansour and his graduate students co-founded two companies: AdHawk Microsystem and Integrated Circuit Scanning Probe Instruments (ICSPI-Corp)

Professor Mansour is a Fellow of IEEE, a Fellow of the Canadian Academy of Engineering (CAE), a Fellow of the Engineering Institute of Canada (EIC). He was the recipient of the 2014 Professional Engineers Ontario (PEO) Engineering Medal for Research and Development and the 2019 IEEE Canada A.G.L. McNaughton Gold Medal Award.

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