Surface and Materials Engineering for Enhanced MEMS Reliability by Prof. Roya Maboudian


IEEE Santa Clara Valley Reliability Chapter April Meeting



Advances in the micro- and nanoelectromechanical systems (M/NEMS) have created a growing interest in evaluating the reliability of these miniaturized devices. The critical reliability issues include adhesion (also called stiction), friction, wear and corrosion.In this presentation, the impact of these interactions in the M/NEMS technology will be discussed.  I will also introduce a number of MEMS-based microinstruments that we have developed to study these interactions, the insights we have gained using them about the nature of surface interactions involved in M/NEMS, and some of the solutions we have developed to address them.

Silicon has been the dominant semiconducting material in micro-/nanosystems technologies. However, the material and surface properties of silicon impose limitations on its use in applications involving harsh environment (such as high temperature, high radiation and corrosive conditions).  Silicon carbide (SiC), a wide bandgap semiconductor, is emerging as a material to address the limitations of silicon as it is temperature tolerant, radiation resistant, and chemically inert.  In the second part of my talk, I will present recent advances, by our group and others, in the materials science and manufacturing technology of SiC MEMS, with particular emphasis on sensor and energy technologies.

For information related to future events please visit: IEEE-SCV-Rel Home

This meeting is co-sponsored by IEEE SFBA MEMS & Sensors Chapter

NOTE: NEW VENUE BELOW. Thanks to ATMEL for their support!

  Date and Time




  • 1600 Technology Drive
  • San Jose, California
  • United States 95110
  • Building: ATMEL
  • Room Number: Main Lobby
  • Click here for Map

Staticmap?size=250x200&sensor=false&zoom=14&markers=37.3645159%2c 121
  • Venue Host: Syed Hussain, Atmel (, 408-821-4665)

    Chair: Guneet Sethi (, 814-441-2515)

    Reliability Chapter Officers

  • Starts 14 March 2015 10:00 AM
  • Ends 02 April 2015 07:00 PM
  • All times are US/Pacific
  • No Admission Charge
  • Register


Prof. Roya Maboudian of University of California, Berkeley


Roya Maboudian is Professor of Chemical and Biomolecular Engineering and Co-Director of the Berkeley Sensor & Actuator Center at the University of California, Berkeley. She is currently serving as editor to the IEEE Journal of Microelectromechanical Systems (JMEMS), and as associate editor to IEEE/SPIE Journal on Micro/Nanolithography, MEMS and MOEMS (JM3).

Prof. Maboudian received her B.S. degree in Electrical Engineering from the Catholic University of America, Washington, D.C., and her M.S. and Ph.D. degrees in Applied Physics from the California Institute of Technology in Pasadena.   Her research interest is in the surface/interface and materials science and engineering of micro/nanosystems, with applications in harsh-environment sensing, health and environmental monitoring, and energy technologies. She is the recipient of several awards, including the Presidential Early Career Award for Scientists and Engineers (PECASE) from the White House, NSF Young Investigator award, and the Beckman Young Investigator award. She is a Fellow of the American Vacuum Society.

Prof. Roya Maboudian of University of California, Berkeley



Check in and food at 6:00PM - 6:30 PM. Presentation from 6:30 PM to 7:30 PM.

For information related to future events please visit: IEEE-SCV-Rel Home

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